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SICERA® Smart KZ-08 Cryopump

Standard Scope of Supply

KZ-08 Cryopump
CSW-61C/D Compressor
Remote Cryopump Controller with RS-485 Cables
Flexible Gas Lines
Power Cables

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About the KZ-08

The SICERA® Smart KZ-08 Cryopump is the smallest model in SHI’s SICERA Smart series. Designed for PVD applications, the KZ-08’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation.

Applications

Specifications

Pumping Speed	Water	4,000 liters/second
	Argon	1,200 liters/second
	Nitrogen	1,500 liters/second
	Hydrogen	2,200 liters/second
Throughput	Argon	1.2 Pa•m³/s (700 sccm)
Capacity	Argon	1,000 standard liters
	Nitrogen	900 standard liters
	Hydrogen	12 standard liters
	Mixture	600 standard liters
Crossover Rating		20.0 Pa•m³
Base Pressure		<5E-7 Pa
Cooldown Time to 20 K¹		≤70 Minutes
Warmup Time to 290 K¹		≤30 Minutes
Weight		28 kg (61.7 lbs.)
Dimensions (LxWxH)		612 x 384 x 230 mm (24.1 x 15.1 x 9.1 in.)
Inlet Flange		ICF253