Marathon® CP-12 Cryopump
About the Marathon® CP-12
The Marathon CP-12 Cryopump is one of SHI’s mid-size cryopumps in the Marathon CP series. It utilizes SHI’s CH-208L 10K Cryocooler, featuring Whisper® technology for quieter operation, and Displex® pneumatic drive technology, limiting the number of wear parts in the refrigerator. It can be serviced in-situ, without breaking vacuum or removing the pump from the chamber. It operates with water-cooled helium compressors.
Available Configurations
- Industry-Standard Flanges
- Standard Manual Operation
- Optional Fully-Automated Operation with Marathon® Cryopump Controller
- Displex® and Whisper® Technology
Standard Scope of Supply
- CP-12 Cryopump
- F-40L/H or F-70L/H Compressor
- 3 m (10 ft.) Flexible Gas Lines
- 3 m (10 ft.) Cold Head Cable
- Tool Kit
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Specifications
| Pumping Speed | Air | 3,600 liters/second |
| Water | 9,560 liters/second | |
| Argon | 3,100 liters/second | |
| Hydrogen | 7,300 liters/second | |
| Throughput | Argon | 12.6 torr-liters/second (1000 sccm) |
| Capacity | Argon (at 1×10-6 torr) | 3,100 standard liters |
| Hydrogen (at 5×10-6 torr) | 50 standard liters | |
| Crossover Rating | 650 torr-liters | |
| Cooldown Time to 20 K | 90 Minutes | |
| Weight | 40.8 kg (90 lbs.) | |
| Dimensions (H) | 600 mm (23.5 in.) | |
| Maintenance | 13,000 Hours | |
Specifications subject to change without notice
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