SICERA® Ultra KV-12 Cryopump
About the KV-12
The SICERA® Ultra KV-12 Cryopump is the largest model in SHI’s SICERA Ultra series, and comprises of two versions specifically designed for ion implantation applications. The KV-12 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model.
Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.
Standard Scope of Supply
- KV-12 Cryopump
- TM-30 or TM-50 Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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Specifications
| Model | KV-12 Low | KV-12 High | |
| Pumping Speed | Water | 11,000 liters/second | |
| Argon | 4,200 liters/second | 4,300 liters/second | |
| Nitrogen | 5,000 liters/second | 5,200 liters/second | |
| Hydrogen | 13,300 liters/second | 15,000 liters/second | |
| Hydrogen Capacity | 40 standard liters | 45 standard liters | |
| Crossover Rating | 40.0 Pa•m3 | ||
| Base Pressure | <5.0E-6 Pa | ||
| Regeneration Time | <165 Minutes | <225 Minutes | |
| Weight | 40 kg (88.2 lbs.) | 44 kg (97.0 lbs.) | |
| Dimensions (LxWxH) | 710 x 480 x 285 mm (28.0 x 18.9 x 11.2 in.) | 710 x 480 x 350 mm (28.0 x 18.9 x 13.8 in.) |
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| Inlet Flange | ISO 320 (clamped flange connection) | ||
| Maintenance | 12,000 Hours | ||
Specifications subject to change without notice
