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SICERA® Smart KZ-10 Cryopump

Standard Scope of Supply

KZ-10 Cryopump
CSW-61C/D Compressor
Remote Cryopump Controller with RS-485 Cables
Flexible Gas Lines
Power Cables

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About the KZ-10

The SICERA® Smart KZ-10 Cryopump is SHI’s mid-size model in the SICERA Smart series. With versions specially designed for PVD or ion implantation applications, the KZ-10’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation.

Applications

Specifications

Model		KZ-10 for PVD	KZ-10 for Ion Implant
Pumping Speed	Water	6,500 liters/second
	Argon	1,900 liters/second	1,990 liters/second
	Nitrogen	2,300 liters/second	2,650 liters/second
	Hydrogen	1,800 liters/second	6,360 liters/second
Throughput	Argon	1.2 Pa•m³/s (700 sccm)	1.0Pa•m³/s (600 sccm)
Capacity	Argon	2,000 standard liters	-
Capacity	Hydrogen	16 standard liters	24 standard liters
Crossover Rating		20.0 Pa•m³
Base Pressure		<1.0E-6 Pa	<5.0E-6 Pa
Cooldown Time to 20 K		≤85 Minutes	≤130 Minutes
Warmup Time to 290 K		≤45 Minutes¹	≤35 Minutes²
Weight		31 kg (68.3 lbs.)	28 kg (61.7 lbs.)
Dimensions (LxWxH)		654 x 335 x 466 mm (25.7 x 13.2 x 18.3 in.)	633 x 460 x 279 mm (24.9 x 18.1 x 11.0 in.)
Inlet Flange		ISO 250 (bolted flange connection)	ISO 250 (clamped flange connection)