Marathon® CP-16 Cryopump
About the Marathon® CP-16
The Marathon CP-16 Cryopump is one of SHI’s mid-size cryopumps in the Marathon CP series. It utilizes SHI’s CH-208R 10K Cryocooler, featuring Whisper® technology for quieter operation, and Displex® pneumatic drive technology, limiting the number of wear parts in the refrigerator. It can be serviced in-situ, without breaking vacuum or removing the pump from the chamber. It operates with water-cooled helium compressors.
Available Configurations
- Industry-Standard Flanges
- Standard Manual Operation
- Optional Fully-Automated Operation with Marathon® Cryopump Controller
- Displex® and Whisper® Technology
Standard Scope of Supply
- CP-16 Cryopump
- F-70L/H Compressor
- 3 m (10 ft.) Flexible Gas Lines
- 3 m (10 ft.) Cold Head Cable
- Tool Kit
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Specifications
| Pumping Speed | Air | 4,800 liters/second |
| Water | 17,300 liters/second | |
| Argon | 4,100 liters/second | |
| Hydrogen | 12,000 liters/second | |
| Throughput | Argon | 11.4 torr-liters/second (900 sccm) |
| Capacity | Argon (at 1×10-6 torr) | 5,500 standard liters |
| Hydrogen (at 5×10-6 torr) | 50 standard liters | |
| Crossover Rating | 500 torr-liters | |
| Cooldown Time to 20 K | 135 Minutes | |
| Weight | 49.9 kg (110 lbs.) | |
| Dimensions (H) | 633 mm (24.9 in.) | |
| Maintenance | 13,000 Hours | |
Specifications subject to change without notice
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