SICERA® Smart KZ-12 Cryopump
About the KZ-12
The SICERA® Smart KZ-12 Cryopump is one of SHI’s mid-size models in SHI’s SICERA Smart series. With versions specially designed for PVD or ion implantation applications, the KZ-12’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to five (5) cryopumps per compressor under normal heat load operation.
Standard Scope of Supply
- KZ-12 Cryopump
- CSW-61C/D Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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Specifications
| Model | KZ-12 for PVD | KZ-12 for Ion Implant | |
| Pumping Speed | Water | 11,000 liters/second | |
| Argon | 3,000 liters/second | 3,470 liters/second | |
| Nitrogen | 3,600 liters/second | 4,470 liters/second | |
| Hydrogen | 4,800 liters/second | 11,330 liters/second | |
| Throughput | Argon | 0.8 Pa•m3/s (500 sccm) | 1.5 Pa•m3/s (900 sccm) |
| Capacity | Argon | 5,000 standard liters | - |
| Hydrogen | 16 standard liters | 35 standard liters | |
| Crossover Rating | 20.0 Pa•m3/s | ||
| Base Pressure | <1.0E-6 Pa | <5.0E-6 Pa | |
| Cooldown Time to 20 K | ≤130 Minutes | ≤170 Minutes | |
| Warmup Time to 290 K1 | ≤60 Minutes | ≤35 Minutes2 | |
| Weight | 53 kg (116.8 lbs.) | 32 kg (70.5 lbs.) | |
| Dimensions (LxWxH) | 735 x 509 x 392 mm (28.9 x 20.0 x 15.4 in.) | 673 x 500 x 285 mm (26.5 x 19.7 x 11.2 in.) |
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| Inlet Flange | ISO 320 (bolted flange connection) | ISO 320 (clamped flange connection) | |
| Maintenance | 12,000 Hours | ||
2 Warmup time to 280 K, if gas is not absorbed.
Specifications subject to change without notice
