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SICERA® Smart KZ-12 Cryopump

Standard Scope of Supply

KZ-12 Cryopump
CSW-61C/D Compressor
Remote Cryopump Controller with RS-485 Cables
Flexible Gas Lines
Power Cables

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About the KZ-12

The SICERA® Smart KZ-12 Cryopump is the largest model in SHI’s SICERA Smart series. With versions specially designed for PVD or ion implantation applications, the KZ-12’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation.

Applications

Specifications

Model		KZ-12 for PVD	KZ-12 for Ion Implant
Pumping Speed	Water	11,000 liters/second
	Argon	1,900 liters/second	3,470 liters/second
	Nitrogen	2,300 liters/second	4,470 liters/second
	Hydrogen	1,800 liters/second	11,330 liters/second
Throughput	Argon	1.2 Pa•m³/s (700 sccm)	1.5 Pa•m³/s (900 sccm)
Capacity	Argon	3,500 standard liters	-
Capacity	Hydrogen	16 standard liters	35 standard liters
Base Pressure		<1.0E-6 Pa	<5.0E-6 Pa
Cooldown Time to 20 K		≤135 Minutes	≤170 Minutes
Warmup Time to 290 K¹		≤55 Minutes	≤35 Minutes²
Weight		55 kg (121.3 lbs.)	32 kg (70.5 lbs.)
Dimensions (LxWxH)		735 x 425 x 493 mm (28.9 x 16.7 x 19.4 in.)	673 x 463 x 450 mm (26.5 x 18.2 x 17.7 in.)
Inlet Flange		ISO 320 (bolted flange connection)	ISO 320 (clamped flange connection)
Maintenance		16,000 Hours