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SICERA® Ultra KV-10 Cryopump

Standard Scope of Supply

KV-10 Cryopump
TM-30 or TM-50 Compressor
Remote Cryopump Controller with RS-485 Cables
Flexible Gas Lines
Power Cables

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About the KV-10

The SICERA® Ultra KV-10 Cryopump is the mid-size model in SHI’s SICERA Ultra series, and is designed for PVD applications. The KV-10 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model.

Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.

Applications

Specifications

Pumping Speed	Water	6,500 liters/second
	Argon	1,900 liters/second
	Nitrogen	2,300 liters/second
	Hydrogen	1,800 liters/second
Throughput	Argon	1.2 Pa•m³/s (700 sccm)
Capacity	Argon	2,000 standard liters
Capacity	Hydrogen	16 standard liters
Crossover Rating		20.0 Pa•m³
Base Pressure		<5.0E-6 Pa
Cooldown Time to 20 K¹		≤85 Minutes
Warmup Time to 290 K¹		≤45 Minutes
Weight		31 kg (68.3 lbs.)
Dimensions (LxWxH)		654 x 335 x 454 mm (25.7 x 13.2 x 17.9 in.)
Inlet Flange		ISO 250 (bolted flange connection)