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SICERA® Ultra KV-08 Cryopump

Standard Scope of Supply

KV-08 Cryopump
TM-30 or TM-50 Compressor
Remote Cryopump Controller with RS-485 Cables
Flexible Gas Lines
Power Cables

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About the KV-08

The SICERA® Ultra KV-08 Cryopump is the smallest model in SHI’s SICERA Ultra series, and is designed for PVD applications. The KV-08 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model. Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.

Applications

Specifications

Pumping Speed	Water	4,000 liters/second
	Argon	1,200 liters/second
	Nitrogen	1,500 liters/second
	Hydrogen	2,200 liters/second
Throughput	Argon	1.2 Pa•m³/s (700 sccm)
Capacity	Argon	1,600 standard liters
	Nitrogen	1,000 standard liters
	Hydrogen	12 standard liters
Crossover Rating		20.0 Pa•m³
Base Pressure		<5E-7 Pa
Cooldown Time to 20 K¹		≤75 Minutes
Warmup Time to 290 K¹		≤45 Minutes
Weight		28 kg (61.7 lbs.)
Dimensions (LxWxH)		612 x 448 x 230 mm (24.1 x 17.6 x 9.1 in.)
Inlet Flange		ICF253