Marathon® CP-20 Cryopump
About the Marathon® CP-20
The Marathon CP-20 Cryopump is SHI’s largest cryopump in the Marathon CP series. It utilizes SHI’s CH-210 10K Cryocooler, featuring Whisper® technology for quieter operation, and Displex® pneumatic drive technology, limiting the number of wear parts in the refrigerator. It can be serviced in-situ, without breaking vacuum or removing the pump from the chamber. It operates with water-cooled helium compressors.
Available Configurations
- Industry-Standard Flanges
- Standard Manual Operation
- Optional Fully-Automated Operation with Marathon® Cryopump Controller
- Displex® and Whisper® Technology
Standard Scope of Supply
- CP-20 Cryopump
- F-70L/H Compressor
- 3 m (10 ft.) Flexible Gas Lines
- 3 m (10 ft.) Cold Head Cable
- Tool Kit
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Specifications
| Pumping Speed | Air | 9,700 liters/second |
| Water | 29,100 liters/second | |
| Argon | 8,300 liters/second | |
| Hydrogen | 14,000 liters/second | |
| Throughput | Argon | 11.3 torr-liters/second (895 sccm) |
| Capacity | Argon (at 1×10-6 torr) | 6,000 standard liters |
| Hydrogen (at 5×10-6 torr) | 33 standard liters | |
| Crossover Rating | 400 torr-liters | |
| Cooldown Time to 20 K | 190 Minutes | |
| Weight | 77.1 kg (170 lbs.) | |
| Dimensions (H) | 569 mm (22.4 in.) | |
| Maintenance | 13,000 Hours | |
Specifications subject to change without notice
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