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SICERA® Cryopumps and Cold Traps

SICERA® systems deliver the performance, reliability, and energy efficiency that today’s semiconductor fabs and research environments demand.  Proven in PVD, ion implantation, and other high-vacuum applications, SICERA systems are engineered for seamless integration, long run times, and reduced total cost of ownership.

Subcategories:
SICERA® Cryopump
SICERA® In-situ Cold Trap
SICERA® In-line Cold Trap
SICERA® In-line Cold Trap (Thin Type)
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Learn more about what led SHI Advanced Technologies to become an international leader in the design and manufacture of cryogenic equipment.

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