SICERA® Smart KZ-08 Cryopump
About the KZ-08
The SICERA® Smart KZ-08 Cryopump is the smallest model in SHI’s SICERA Smart series. Designed for PVD applications, the KZ-08’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to five (5) cryopumps per compressor under normal heat load operation.
Standard Scope of Supply
- KZ-08 Cryopump
- CSW-61C/D Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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Specifications
| Pumping Speed | Water | 4,000 liters/second |
| Argon | 1,200 liters/second | |
| Nitrogen | 1,500 liters/second | |
| Hydrogen | 2,200 liters/second | |
| Throughput | Argon | 1.2 Pa•m3/s (700 sccm) |
| Capacity | Argon | 1,600 standard liters |
| Hydrogen | 12 standard liters | |
| Crossover Rating | 20.0 Pa•m3 | |
| Base Pressure | <5E-7 Pa | |
| Cooldown Time to 20 K1 | ≤75 Minutes | |
| Warmup Time to 290 K1 | ≤45 Minutes | |
| Weight | 28 kg (61.7 lbs.) | |
| Dimensions (LxWxH) | 613 x 397 x 230 mm (24.1 x 15.6 x 9.1 in.) |
|
| Inlet Flange | ICF253 | |
| Maintenance | 12,000 Hours | |
Specifications subject to change without notice
