SICERA® Smart KZ-20 Cryopump
About the KZ-20
The SICERA® Smart KZ-20 Cryopump is the largest model in SHI’s SICERA Smart series. Specially designed for PVD applications, the KZ-20’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to five (5) cryopumps per compressor under normal heat load operation.
Standard Scope of Supply
- KZ-20 Cryopump
- CSW-61C/D Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
Interested in this product? Please Call Your Local Office for More Information.
Specifications
| Model | KZ-20 for PVD | |
| Pumping Speed | Water | 29,000 liters/second |
| Argon | 6,700 liters/second | |
| Nitrogen | 8,000 liters/second | |
| Hydrogen | 15,000 liters/second | |
| Throughput | Argon | 1,2 Pa•m3/s (700 sccm) |
| Capacity | Argon | 10,000 standard liters |
| Hydrogen | 56 standard liters | |
| Crossover Rating | 80.0 Pa•m3/s | |
| Base Pressure | <1.0E-6 Pa | |
| Cooldown Time to 20 K1 | ≤180 Minutes | |
| Warmup Time to 290 K1 | ≤85 Minutes2 | |
| Weight | 78 kg (172.0 lbs.) | |
| Dimensions (LxWxH) | 894 x 572 x 413 mm (35.2 x 22.5 x 16.3 in.) |
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| Inlet Flange | ISO 500 (clamped flange connection) | |
| Maintenance | 12,000 Hours | |
2 Warmup time to 280 K, if gas is not absorbed.
Specifications subject to change without notice
