SICERA® Ultra KV-10 Cryopump
About the KV-10
The SICERA® Ultra KV-10 Cryopump is the mid-size model in SHI’s SICERA Ultra series, and is designed for PVD applications. The KV-10 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model.
Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.
Standard Scope of Supply
- KV-10 Cryopump
- TM-30 or TM-50 Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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Specifications
| Pumping Speed | Water | 6,500 liters/second |
| Argon | 1,900 liters/second | |
| Nitrogen | 2,300 liters/second | |
| Hydrogen | 1,800 liters/second | |
| Throughput | Argon | 1.2 Pa•m3/s (700 sccm) |
| Capacity | Argon | 2,000 standard liters |
| Hydrogen | 16 standard liters | |
| Crossover Rating | 20.0 Pa•m3 | |
| Base Pressure | <5.0E-6 Pa | |
| Cooldown Time to 20 K1 | ≤85 Minutes | |
| Warmup Time to 290 K1 | ≤45 Minutes | |
| Weight | 31 kg (68.3 lbs.) | |
| Dimensions (LxWxH) | 654 x 335 x 454 mm (25.7 x 13.2 x 17.9 in.) |
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| Inlet Flange | ISO 250 (bolted flange connection) | |
| Maintenance | 12,000 Hours | |
Specifications subject to change without notice
