SICERA® Smart KZ-10 Cryopump
About the KZ-10
The SICERA® Smart KZ-10 Cryopump is one of SHI’s mid-size models in the SICERA Smart series. With versions specially designed for PVD or ion implantation applications, the KZ-10’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to five (5) cryopumps per compressor under normal heat load operation.
Standard Scope of Supply
- KZ-10 Cryopump
- CSW-61C/D Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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Specifications
| Model | KZ-10 for PVD | KZ-10 for Ion Implant | |
| Pumping Speed | Water | 6,500 liters/second | |
| Argon | 1,900 liters/second | 1,990 liters/second | |
| Nitrogen | 2,300 liters/second | 2,650 liters/second | |
| Hydrogen | 1,800 liters/second | 6,360 liters/second | |
| Throughput | Argon | 1.2 Pa•m3/s (700 sccm) | 1.0Pa•m3/s (600 sccm) |
| Capacity | Argon | 2,000 standard liters | - |
| Hydrogen | 16 standard liters | 24 standard liters | |
| Crossover Rating | 20.0 Pa•m3 | ||
| Base Pressure | <1.0E-6 Pa | <5.0E-6 Pa | |
| Cooldown Time to 20 K | ≤85 Minutes | ≤130 Minutes | |
| Warmup Time to 290 K | ≤45 Minutes1 | ≤35 Minutes2 | |
| Weight | 26 kg (57.3 lbs.) | 28 kg (61.7 lbs.) | |
| Dimensions (LxWxH) | 631 x 493 x 239 mm (24.8 x 19.4 x 9.4 in.) | 632 x 460 x 279 mm (24.9 x 18.1 x 11.0 in.) |
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| Inlet Flange | ISO 250 (clamped flange connection) | ||
| Maintenance | 12,000 Hours | ||
2 Warmup time to 280 K, if gas is not absorbed.
Specifications subject to change without notice
